Bernex CVD experts have been using a research machine tool to generate their latest coatings. Taking the essence of this equipment, Bernex now offers this industrial version on the market. CVD LabTube is the perfect Swiss knife for all CVD thin-film developers.
  • AlCl3 generator
  • HTC (High Temperature Chlorinator for MeClx generation, like ZrCl4 or HfCl4)
  • NH3 module
  • BCl3 module
  • Up to four liquid modules with dedicated controlled evaporators, using carrier / purging gas supply Internal chlorinator module (> 900°C) Solid precursor sublimator
  • Possibility to combine with the Bernex MOCVD (Metal-Organic CVD) Evaporator
  • Tailored options are available on demand

For more information download the product flyer or send us a request.

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