Bernex CVD experts have been using a research machine tool to generate their latest coatings.
Taking the essence of this equipment, Bernex now offers this industrial version on the market. CVD LabTube is the perfect Swiss knife for all CVD thin-film developers.
HTC (High Temperature Chlorinator for MeClx
generation, like ZrCl4 or HfCl4)
Up to four liquid modules with dedicated controlled
evaporators, using carrier / purging gas supply Internal chlorinator module (> 900°C) Solid precursor sublimator
Possibility to combine with the Bernex MOCVD
(Metal-Organic CVD) Evaporator
Tailored options are available on demand
For more information download the product flyer or send us a request.